发明名称 Integrated sensor chip unit
摘要 The invention relates to a sensor module, in particular a measured-value pickup ( 2 ) for determining measurement data and a circuit arrangement ( 3 ) for enabling a wire-free power supply and interrogation of the measurement data. The measured-value pickup is formed as an integrable sensor ( 2 ), and the circuit arrangement is formed as an integrated semiconductor circuit module ( 3 ), the sensor ( 2 ) and the semiconductor circuit module ( 3 ) being mechanically and electrically conductively connected to one another to form an integrated sensor chip unit ( 1 ) using microsystems engineering means.
申请公布号 US2006157701(A1) 申请公布日期 2006.07.20
申请号 US20060329981 申请日期 2006.01.10
申请人 发明人 BAUER ROBERT;HAGEN JOCHEN V.
分类号 H01L23/58;A61B5/00;G01D3/02;G01L19/08;H01L23/48 主分类号 H01L23/58
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