摘要 |
An oxide-based electrolytic structure and process is disclosed, which is particularly useful for use as an oxygen separation device. The disclosed structures utilize thin film layers to provide the oxygen separation in conjunction with polymer substrate materials. The disclosed devices operate at relatively low temperatures to provide a relatively low flux density (typically 10<SUP>-10</SUP>-<SUP/>10<SUP>-14</SUP>g/cm<SUP>2</SUP> sec) of ion conduction, compared to prior art solid oxide electrolytes, whereas substantial oxygen separation is provided over relatively large areas. The disclosed oxygen separation devices are particularly suited for protection of organic-based semiconductors. |