| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for discriminating a common defect among a plurality of substrates located at the same position accurately, at high speed and at low cost. <P>SOLUTION: The method for discriminating a common defect includes a step S2 wherein an area of a substrate subject to inspection is divided into specified areas formed of repeated patterns, and an area coordinate is set to identify the respective divided areas; a defect detection step S3 to detect any defect for each of the substrates, and to measure the position of the defect; an area assignment step S5 to assign the divided areas belonging to the defect according to the position of the detected defect; area extraction steps S6 and S7 to compare the divided areas assigned by defects in the substrates, and to extract the divided areas in which any defect exists among the respective substrates as a common defect area; and defect discriminating steps S8 to S10 in each of which the position of the defect belonging to the common defect area in each of the substrates is compared and the defect that exists at the same position of the respective substrates is discriminated as a common defect. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
