| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which can detect the positional relationship between a converged point of the laser beam radiated from a condenser of a laser beam radiating means and a height detecting means. <P>SOLUTION: The laser beam machining apparatus comprises a chuck table for holding a workpiece, the laser beam radiating means having the condenser for radiating the laser beam on the workpiece held by the chuck table, a converged point position adjusting means for moving the condenser, a height detecting means for detecting the height of the upper surface of the workpiece held by the chuck table, and a control means for controlling the converged point position adjusting means based on the height signal detected by the height detecting means. A converged point detecting table for detecting the positional relationship between the converged point of the converged point detecting laser beam radiated from the condenser and the height detecting means is arranged in the neighborhood of the chuck table. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
