摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stacked piezoelectric element capable of suppressing the peeling of a conductive adhesive and having a structure excellent in durability and reliability, and also to provide its manufacturing method. <P>SOLUTION: The stacked piezoelectric element 1 includes a ceramic laminate 10 obtained by alternately laminating a piezoelectric layer 11 made of a piezoelectric material and conductive internal electrode layers 21, 22, and by forming a protective layer 12 made of ceramics at both ends thereof in a lamination direction; and is configured in such a way that an external electrode 34 is joined with side surfaces 101, 102 of the ceramic laminate 10 via the conductive adhesive 33. In side surfaces 121, 122 of at least one protective layer 12 between the protective layers 12 disposed at both ends, there are formed one or a plurality of inwardly recessed grooves 13, and the conductive adhesive 33 invades at least a part of the groove 13. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |