| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam device not requiring skill of a user represented by a scanning electron microscope suitable for obtaining a dark-field STEM image. SOLUTION: A GUI screen 40 for inputting or displaying a detected scattering angleαor a number (Z contrast Cz) corresponding to the scattering angle is arranged to the electron beam device. A pre-scan window screen 52 for obtaining and displaying a plurality of pre-scan images 52-n is arranged as an assist function for easily finding an optimum condition of the detected scattering angleα, and a means for registering the plurality of pre-scan images in compliance with the position d of a dark-field detector 14 (condition of a detected scattering angleαd) is arranged. Furthermore, an observation condition of the corresponding detected scattering angleαd is set by selecting the pre-scan image displayed on the pre-scan image 52-n on the pre-scan window screen 52. COPYRIGHT: (C)2006,JPO&NCIPI
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