IMPROVED INSPECTION OF TFT LCD PANELS USING ON-DEMAND AUTOMATED OPTICAL INSPECTION SUB-SYSTEM

摘要

In an inspection system for electrical and electro-optical inspection of TFT-LCD panels (836), a fine resolution area imaging camera (822) with a pulse illumination source (826) disposed to scan the region and operative capture images of the region illuminated with pulses of short illumination and automatically maintained in focus while continuously scanning in order to resolve points of defects.