发明名称 |
Method of producing substrates for optoelectronic applications |
摘要 |
The present invention relates to a method of producing a substrate for an optoelectronic application, the substrate having at least one active nitride layer on a final carrier and a metallic intermediate layer therebetween, wherein the method comprises: preparation of an auxiliary substrate wherein one semi-conducting nitride layer is placed on an auxiliary carrier; metallising the auxiliary substrate on the side of the nitride layer; bonding of the metallised carrier substrate with the final carrier; and removing of the auxiliary carrier after the bonding step. It is the object of the present invention to provide a method of this type in which the crystalline quality of the active nitride layer(s) can be improved. The object is solved by a method of the above mentioned type wherein the step of preparing the auxiliary substrate comprises: detaching a part from a massive semi-conducting nitride substrate; and transferring said part onto the auxiliary carrier to form the semi-conducting nitride layer thereon. |
申请公布号 |
EP1681712(A1) |
申请公布日期 |
2006.07.19 |
申请号 |
EP20050290082 |
申请日期 |
2005.01.13 |
申请人 |
S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES S.A. |
发明人 |
LETERTRE, FABRICE;FAURE, BRUCE |
分类号 |
H01L21/20;H01L33/00 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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