| 发明名称 |
FRONT OPENING SUBSTRATE CONTAINER WITH BOTTOM PLATE |
| 摘要 |
<p>A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.</p> |
| 申请公布号 |
EP1680325(A2) |
申请公布日期 |
2006.07.19 |
| 申请号 |
EP20040800826 |
申请日期 |
2004.11.08 |
| 申请人 |
ENTEGRIS, INC. |
发明人 |
BURNS, JOHN;FULLER, MATTHEW, A.;KING, JEFFERY, J.;FORBES, MARTIN, L.;SMITH, MARK, V. |
| 分类号 |
B65D;B65D85/30;H01L21/673;(IPC1-7):B65D1/00 |
主分类号 |
B65D |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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