Composite particles and production process thereof, aqueous dispersion composition for chemical polishing, and process for manufacture of semiconductor device

摘要

This invention relates to a free radical control agent and a process for producing a free radical control agent of the structural formula:
wherein Z is selected from the group consisting of
wherein R 1 is an alkyl group of 1 to 4 carbon atoms, cyclohexyl or phenyl; wherein R 2 is an alkoxy group of 1 to 8 carbon atoms or a cycloalkoxy group of 5 to 8 carbon atoms; wherein Alk is a divalent hydrocarbon of 1 to 18 carbon atoms; and wherein Y represents a functional group that is capable of activating a vinylic carbon toward free radical addition.