发明名称 |
Apparatus and method for chemical-mechanical polishing (CMP) using a head having a direct pneumatic wafer polishing pressure system |
摘要 |
<p>The invention relates to a substrate carrier for holding a substrate (113) during a processing operation, said substrate carrier comprising: a disk-shaped block (160) of substantially non-porous material having a first surface for mounting said substrate, a second surface, and a third substantially cylindrical surface connecting said first and second surfaces; said first surface being substantially planar except for at least one cavity (250) extending from said substantially planar surface into an interior portion of said substrate carrier; a fluid communication (191',184') channel extending from said cavity to either said second surface or to said third surface to communicate a fluid from a source of fluid to said cavity; said first surface adapted to receive a flexible membrane (161) to cover said cavity and form a chamber (262) capable of holding a pressure when said fluid is communicated from said source of fluid to said cavity; and said membrane (161) expanding when said fluid is communicated under a pressure to said chamber (262) and exerting a force on a substrate (113) mounted to said membrane (161).</p> |
申请公布号 |
EP1437197(B1) |
申请公布日期 |
2006.07.19 |
申请号 |
EP20040007064 |
申请日期 |
2000.03.01 |
申请人 |
EBARA CORPORATION |
发明人 |
MALONEY, GERARD, S.;PRICE, JASON;CHIN, SCOTT;KAJIWARA, JIRO;CHARIF, MALEK |
分类号 |
B24B37/30;B24B37/32;B24B41/06;B24B49/16;H01L21/304 |
主分类号 |
B24B37/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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