A method and an apparatus are provided for parallel fault detection. The method comprises receiving data associated with processing of a workpiece by a first processing tool, receiving data associated with processing of a workpiece by a second processing tool and comparing at least a portion of the received data to a common fault model to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.
申请公布号
GB2411291(B)
申请公布日期
2006.07.19
申请号
GB20050010169
申请日期
2003.11.06
申请人
ADVANCED MICRO DEVICES, INC
发明人
ELFIDO COSS JR;ERNEST D ADAMS III;ROBERT J CHONG;HOWARD E CASTLE;THOMAS J SONDERMAN;ALEXANDER J PASADYN