Method for depositing a layer on a surface of a substrate,申请号EP20010111582-传众专利搜索

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发明名称	Method for depositing a layer on a surface of a substrate
摘要
申请公布号	EP1158071(A3)	申请公布日期	2006.07.19
申请号	EP20010111582	申请日期	2001.05.11
申请人	APPLIED MATERIALS, INC.	发明人	ROSSMAN, KENT;LI, ZHUANG;LEE, YOUNG
分类号	C23C16/44;C23C16/04;C23C16/40;H01L21/00;H01L21/316;H01L21/762;H01L21/768	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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