| 摘要 |
<p>A laser optics unit including: an optics head with an imaging or focussing lens and lens control means adapted to provide a laser beam giving an image of a mask or a focus of a beam 14 along an axis of the beam at a datum point in the unit; a work station adapted to position a substrate work piece relative to the datum point so as to provide for the positioning of the mask image or beam focus along the axis of the beam perpendicular to a substrate work piece positioned by the work station; the work station being further adapted to displace the work place in a given direction transverse the beam axis; a puck 11 and means for providing for the puck to be fluid supported over a puck region on a substrate work piece at the work station; and link means linking the puck to the optics head to enable the puck to displace the optics head relative to the axis direction; characterised by off-setting means whereby the puck, and so the puck region, at least when the puck 11 is fluid supported, is offset from the axis of the laser beam in a direction perpendicular to the beam axis.</p> |
