| 发明名称 |
MICROSTRUCTURE WITH MOVABLE MASS |
| 摘要 |
A microstructure includes a mass; a base member in which the mass is movably contained. The mass includes a surface, which is exposed out of the base member, and a stopper wire, which is arranged above the surface of the mass so as to inhibit over move of the mass. |
| 申请公布号 |
EP1423714(B1) |
申请公布日期 |
2006.07.19 |
| 申请号 |
EP20020760798 |
申请日期 |
2002.09.02 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
HASHIMOTO, HIROYUKI;OOASA, TAKAHIKO;IKEUCHI, NAOKI;HARADA, MUNEO |
| 分类号 |
G01P15/12;B81B3/00;B81B7/00;B81C1/00;G01C19/56;G01C19/5719;G01P15/00;G01P15/08;G01P15/18 |
主分类号 |
G01P15/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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