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发明名称
BALL REWORK SYSTEM FOR REPAIRING BAD BALL(S) ON THE SURFACE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100604676(B1)
申请公布日期
2006.07.19
申请号
KR20050023630
申请日期
2005.03.22
申请人
TSE ENGINEERING CO., LTD.
发明人
LEE, KI SUNG
分类号
H01L21/50
主分类号
H01L21/50
代理机构
代理人
主权项
地址
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