发明名称 |
Reflecting device for electromagnetic waves |
摘要 |
A device serves for reflecting electromagnetic waves, in particular in a length range less than 200 nm. It has a mirror carrier made of a material with at least approximately vanishing thermal expansion and at least one reflective layer applied on said mirror carrier. An intermediate layer made of a material which is formed such that its surface roughness is not significantly increased after beam processing methods is fitted between the mirror carrier and the reflective layer.
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申请公布号 |
US7077533(B2) |
申请公布日期 |
2006.07.18 |
申请号 |
US20040477772 |
申请日期 |
2004.04.26 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
WEISER MARTIN;DINGER UDO;STACKLIES SIEGFRIED;HAIDL MARKUS |
分类号 |
G02B5/08;G03F1/14;G03F1/24;G03F7/20;G21K1/06 |
主分类号 |
G02B5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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