METAL CMP SLURRY AND METAL POLISHING METHOD USING THEREOF,申请号KR20050002949-传众专利搜索

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发明名称	METAL CMP SLURRY AND METAL POLISHING METHOD USING THEREOF
摘要
申请公布号	KR20060082451(A)	申请公布日期	2006.07.18
申请号	KR20050002949	申请日期	2005.01.12
申请人	CHEIL INDUSTRIES INC.	发明人	LEE, JAE SEOK;KANG, DONG HUN;LA, JUNG IN;LEE, IN KYUNG
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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