发明名称 Methods and compositions for removing group VIII metal-containing materials from surfaces
摘要 A method and composition for removing Group VIII metal-containing materials from a surface (preferably, a platinum-containing, and more preferably, a platinum-rhodium-containing surface) involves the use of a mixture of phosphoric acid, sulfuric acid, nitric acid, and hydrochloric acid.
申请公布号 US7077975(B2) 申请公布日期 2006.07.18
申请号 US20020215215 申请日期 2002.08.08
申请人 MICRON TECHNOLOGY, INC. 发明人 MORGAN PAUL A.
分类号 B44C1/22;B08B3/08;C03C15/00;C03C25/68;C09G1/02;C23F1/00;C25F3/00;H01L21/321;H01L21/3213 主分类号 B44C1/22
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