发明名称 |
Automatic intelligent yield improving and process parameter multivariate system and the analysis method thereof |
摘要 |
An automatic intelligent yield improving and process parameter multivariate analysis system and the analysis method thereof. The system is applied to a computer to set up analysis procedures for analyzing process parameters obtained from each measuring machine in semiconductor testing process by utilizing data mining technology. The system includes a plurality of semiconductor processing nodes having different functions. The system links each of the semiconductor processing node to another semiconductor processing node by a logic means so that the computer can process the semiconductor processing nodes sequentially. The system also links the semiconductor processing nodes by a data connection means to allow microprocessors to load necessary parameter data or wafer lot numbers from corresponding semiconductor processing nodes by a data connection means.
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申请公布号 |
US7079677(B2) |
申请公布日期 |
2006.07.18 |
申请号 |
US20030249148 |
申请日期 |
2003.03.19 |
申请人 |
POWERCHIP SEMICONDUCTOR CORP. |
发明人 |
TAI HUNG-EN;WANG SHENG-JEN |
分类号 |
G06K9/00;G06K9/36;G06Q10/00;H01L21/00 |
主分类号 |
G06K9/00 |
代理机构 |
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地址 |
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