发明名称 |
Microelectronic device with depth adjustable sill |
摘要 |
A microelectronic device includes a substrate, and a patterned feature located over the substrate and a plurality of doped regions, wherein the patterned feature includes at least one electrode. The microelectronic device includes at least one sill region for the enhancement of electron and/or hole mobility.
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申请公布号 |
US7078723(B2) |
申请公布日期 |
2006.07.18 |
申请号 |
US20040819250 |
申请日期 |
2004.04.06 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
LIN CHUAN-YI;LEE WEN-CHIN;CHANG SUN-JAY;WU SHIEN-YANG |
分类号 |
H01L29/06;H01L21/223;H01L21/336;H01L21/8234;H01L29/786;H01L31/109 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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