发明名称 Microelectronic device with depth adjustable sill
摘要 A microelectronic device includes a substrate, and a patterned feature located over the substrate and a plurality of doped regions, wherein the patterned feature includes at least one electrode. The microelectronic device includes at least one sill region for the enhancement of electron and/or hole mobility.
申请公布号 US7078723(B2) 申请公布日期 2006.07.18
申请号 US20040819250 申请日期 2004.04.06
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LIN CHUAN-YI;LEE WEN-CHIN;CHANG SUN-JAY;WU SHIEN-YANG
分类号 H01L29/06;H01L21/223;H01L21/336;H01L21/8234;H01L29/786;H01L31/109 主分类号 H01L29/06
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