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发明名称
用于电浆反应器之气体分布板组件
摘要
一种阻隔板组件,其系用于使气体流动分布进入一个包含有将被进行处理之一半导体晶圆的相邻处理容室之中,该阻隔板组件系包括有:一个具有复数个穿孔于其中之平面的气体分布部分;一个环绕着气体分布部分的凸缘;以及一个被置中地附接至气体分布部分的冲击装置,其中,该装置系包括有一个盖子以及一个柄杆,该柄杆系与气体分布部分相互热接触。亦被揭露于本文中的是利用阻隔板组件的电浆反应器,以及用于降低在电浆中之物质重组的方法。
申请公布号
TW200625371
申请公布日期
2006.07.16
申请号
TW094101136
申请日期
2005.01.14
申请人
艾克塞利斯科技公司
发明人
厄辛 史利伐斯塔伐
分类号
H01J17/00
主分类号
H01J17/00
代理机构
代理人
林镒珠
主权项
地址
美国
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