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发明名称
照明光学装置、照明光学装置的制造方法、照明光学装置的调整方法、曝光装置以及曝光方法
摘要
一种照明光学装置,其可良好地抑制一照明光路中之光的偏光状态,以所期望的偏光状态的光来对被照射面进行照明。此照明光学装置依据由光源(1)所供给的光来对被照射面(M,W)进行照明且具备一偏光设定部(3,7),其配置在光源和被照射面之间的光路中,以将到达被照射面上的光的偏光状态设定成所定的偏光状态。该偏光设定部和被照射面之间的光路中所配置的多个光透过构件的每一个都由一种可将内部偏斜所造成的复折射量抑制在5 nm/cm以下的光学材料所形成。
申请公布号
TW200625024
申请公布日期
2006.07.16
申请号
TW094142415
申请日期
2005.12.02
申请人
尼康股份有限公司
发明人
重松幸二
分类号
G03F7/20;H01L21/027
主分类号
G03F7/20
代理机构
代理人
詹铭文;萧锡清
主权项
地址
日本
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