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经营范围
发明名称
Method for forming metal wire of FeRAM
摘要
申请公布号
KR100599432(B1)
申请公布日期
2006.07.14
申请号
KR20000036852
申请日期
2000.06.30
申请人
发明人
分类号
H01L21/8232
主分类号
H01L21/8232
代理机构
代理人
主权项
地址
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