发明名称 |
GRIPPER FOR HOLDING AND POSITIONING A DISC- OR PLATE-SHAPED OBJECT AND METHOD FOR HOLDING AND POSITIONING A DISC- OR PLATE-SHAPED OBJECT |
摘要 |
The invention relates to a gripper (20) for contactlessly holding and precisely positioning a disc-shaped or plate-shaped object (31, 32), which has a holding device (21) for generating a holding force acting essentially perpendicular to the principal plane of extension of the object (31, 32). To this end, the gripper (20) has positioning nozzles (22), which are separate from the holding device (21) and which are provided for generating a positioning force acting essentially parallel to the principal plane of extension of the object (31, 32) by means of a fluid exiting the positioning nozzles (22). |
申请公布号 |
WO2006072422(A1) |
申请公布日期 |
2006.07.13 |
申请号 |
WO2005EP14013 |
申请日期 |
2005.12.23 |
申请人 |
NANOPHOTONICS AG;SIEBERT, SOENKE;LANG, ANDREAS;BINDER, ALFRED;ABRAHAM, MICHAEL |
发明人 |
SIEBERT, SOENKE;LANG, ANDREAS;BINDER, ALFRED;ABRAHAM, MICHAEL |
分类号 |
H01L21/683;B65G47/91;H01L21/68 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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