发明名称 |
Flexible membrane for multi-chamber carrier head |
摘要 |
A flexible membrane for use with a carrier head of a substrate chemical mechanical polishing apparatus has a central portion with an outer surface providing a substrate receiving surface, a perimeter portion for connecting the central portion to a base of the carrier head, and at least one flap extending from an inner surface of the central portion. The flap includes a laterally extending first section and a vertically extending second section connecting the laterally extending first section to the central portion.
|
申请公布号 |
US2006154580(A1) |
申请公布日期 |
2006.07.13 |
申请号 |
US20050321006 |
申请日期 |
2005.12.28 |
申请人 |
APPLIED MATERIALS, INC., A DELAWARE CORPORATION |
发明人 |
CHEN HUNG C.;OH JEONGHOON;ZUNIGA STEVEN M. |
分类号 |
B24B29/00;B24D99/00 |
主分类号 |
B24B29/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|