摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater and a manufacturing method superior in electric durability and strength in a severe environment. SOLUTION: The ceramic heater 1 is column-shaped, and a ceramic laminate 3 of which the main component is alumina is wound around a core material 2 of which similarly the main component is alumina. In this ceramic laminate 3, an exothermic body 6 of which the main component is tungsten (W) is pinched between a first ceramic layer 4 and a second ceramic layer 5. In the ceramic laminate 3, the ratio (a1/a2) of an intercept particle diameter (a1) measured from a surface direction and the intercept particle diameter (a2) measured from the cross-sectional direction is made to be 1.1 to 1.3. COPYRIGHT: (C)2006,JPO&NCIPI
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