| 摘要 |
PROBLEM TO BE SOLVED: To prevent positioning performance deterioration due to the friction of a control object, and to sharply improve follow-up characteristics to a target orbit and a settling time in target precision by adjusting the output of feedback control under the consideration of physical static friction. SOLUTION: A control system is configured of a feedback control unit 11 and a static friction compensator, and when a control object 12 stops with a follow-up error for a target value due to the influence of friction, the output of a feedback control unit is adjusted so that control input application equivalent to static friction can be compensated, and the control input equivalent to the actual static friction is applied to the control object 12. Thus, control performance deterioration due to the static friction can be sharply improved, and follow-up characteristics to a step function type target orbit and a settling time in target precision can be sharply improved. COPYRIGHT: (C)2006,JPO&NCIPI
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