| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe pin capable of improving shock resistance by heightening the hardness of a tip part of a probe pin needle, and adjusting the hardness. SOLUTION: In this probe pin 10 wherein the needle tip part 3a forms a contact part to an integrated circuit chip on a semiconductor wafer as a measuring object, at least the surface of the needle tip part 3a is coated with electroless PTFE-including nickel plating 5, to thereby heighten the surface hardness of the needle tip part 3a and improve shock resistance, and the surface hardness of the needle tip part 3a can be adjusted by adjusting the PTFE content rate. COPYRIGHT: (C)2006,JPO&NCIPI
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