发明名称 METHOD FOR PRODUCING MIXED STACKED STRUCTURES, DIFFERENT INSULATING AREAS AND/OR LOCALISED VERTICAL ELECTRICAL CONDUCTING AREAS
摘要 The invention relates to a method for producing a semiconductor structure consisting in forming in a controlled manner through a mask (31) at least one first area made of an insulating material (36) in a first substrate (30) made of a semiconductor material to the level of the mask lower surface (35) prior to and after removing the mask.
申请公布号 WO2006072871(A2) 申请公布日期 2006.07.13
申请号 WO2005IB54432 申请日期 2005.10.06
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;MORICEAU, HUBERT;FOURNEL, FRANCK;MORALES, CHRISTOPHE 发明人 MORICEAU, HUBERT;FOURNEL, FRANCK;MORALES, CHRISTOPHE
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