METHOD FOR PRODUCING MIXED STACKED STRUCTURES, DIFFERENT INSULATING AREAS AND/OR LOCALISED VERTICAL ELECTRICAL CONDUCTING AREAS
摘要
The invention relates to a method for producing a semiconductor structure consisting in forming in a controlled manner through a mask (31) at least one first area made of an insulating material (36) in a first substrate (30) made of a semiconductor material to the level of the mask lower surface (35) prior to and after removing the mask.
申请公布号
WO2006072871(A2)
申请公布日期
2006.07.13
申请号
WO2005IB54432
申请日期
2005.10.06
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE;MORICEAU, HUBERT;FOURNEL, FRANCK;MORALES, CHRISTOPHE