| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide module in which it has been made possible to form a narrow width groove part in an optical waveguide by a photolithographic process. SOLUTION: The optical waveguide 2 is supported on a waveguide substrate 3 and is provided with a groove part 6, into which a wavelength selection filter 7 is to be inserted. The groove part 6 is provided with a holding part 6a formed in a position crossing the core 4, and wide width parts 6b formed at both end parts of the holding part 6a. The wide width parts 6a are formed with a width larger than that of the holding part 6a, and when the groove part 6 is formed by the photolithographic process, permeation of the developer is improved, so that the groove part 6 is surely formed. COPYRIGHT: (C)2006,JPO&NCIPI |
