| 摘要 |
PROBLEM TO BE SOLVED: To provide a apparatus for inspecting film thickness, capable of highly reliably and inspecting the film thickness with high efficiency. SOLUTION: The film thickness inspection apparatus 1 is provided with a needle part 3; a slider 4 through which the needle part 3 is passed; a helical spring part 5 mounted to the outer circumferential side of the rear end of the slider 4; a plate spring part 6 arranged on the rear-end side of the slider 4; a front tube part 8, in which the slider 4 and the plate spring part 6 are freely fitted; a rear tube part 11, engaged helically with the front tube part 8; and an LED part 14 for emitting light, when being energized by compression of the plate spring part 6. In the case that the needle 3 is inserted in a coating to be inspected by the amount of a standard value D of the thickness of the coating to be inspected, when the needle part 3 is exposed by an amount (acquired by subtracting the amount (d) of compression of the helical spring part 5 and the plate spring part 6 from the standard value D) and inserted through the coating, the plate spring part 6 is compressed to make the LED part 14 emit light. COPYRIGHT: (C)2006,JPO&NCIPI
|
