Device and method for calibration of a mass flow sensor

摘要

A device and method for calibration of a mass flow sensor ( 14 ) employs a flow channel and a holder for the mass flow sensor in the flow channel. An adjustable throttle device is provided between the holder and a connection to a pump during a calibrating operation to operate on the basis of a predetermined time/displacement profile by means of a control device. During operation of the pump, the throttle device generates a supercritical flow with which a flowing medium has the speed of sound in the narrowest cross section of the throttle device.