发明名称 Fabrication method for arranging ultra-fine particles
摘要 A method and resultant device, in which metal nanoparticles are self-assembled into two-dimensional lattices. A periodic hole pattern (wells) is fabricated on a photoresist substrate, the wells having an aspect ratio of less than 0.37. The nanoparticles are synthesized within inverse micelles of a polymer, preferably a block copolymer, and are self-assembled onto the photoresist nanopatterns. The nanoparticles are selectively positioned in the holes due to the capillary forces related to the pattern geometry, with a controllable number of particles per lattice point.
申请公布号 US2006154466(A1) 申请公布日期 2006.07.13
申请号 US20050274916 申请日期 2005.11.14
申请人 发明人 LEE SEUNG-HEON;DIANA FREDERIC S.;BADOLATO ANTONIO;PETROFF PIERRE M.;KRAMER EDWARD J.
分类号 H01L21/44;G11B5/706;H01F1/00;H01F1/153;H01L21/4763 主分类号 H01L21/44
代理机构 代理人
主权项
地址