| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a visual inspection system which enables the practice of the precise examination of an inspection target, even if the inspection target is changed dimensionally in its direction of imaging. <P>SOLUTION: The visual inspection system 200 for performing the visual inspection of a substrate 2 is equipped with a surface imaging unit 80a for taking the surface image of the substrate 2, slave PCs 140a and 140b provided so as to correspond to the surface imaging unit 80a to perform inspection on the basis of the image data of the substrate 2, a back imaging unit 80b for taking the image of the back of the substrate 2 and the slave PCs 140c and 140d provided so as to correspond to the back imaging unit 80b to perform inspection from the image data of the substrate 2. The surface imaging unit 80a is provided with a focal point adjusting motor 40 or the like which constitutes focusing mechanism for aligning a focus with the substrate 2 being the inspection target without changing an image magnification corresponding to the thickness of the substrate 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
