| 摘要 |
PROBLEM TO BE SOLVED: To bent a portion of a movable section, and make the other portions of the movable section in such a condition as not to be bent with high accuracy. SOLUTION: The movable section is constituted of a beam section 9 having an overhung type beam structure in which a fixed edge is fixed through a leg portion 6. A beam portion 13 has two beam components 7, 8 connected in series between the fixed edge and a free edge. A mirror 2 is provided on the free edge side of the beam component 8. The beam component 7 is formed out of SiN membrane 10 on a lower layer, A1 membrane 11 on an intermediate layer, and SiN membrane 12 on an upper layer. The beam component 8 is formed out of a SiN membrane 13 on the lower layer, the Al membrane 11 on the intermediate layer, SiN membrane 14 on the upper layer. The beam component 7 on the fixed edge side is a blade spring portion. The beam component 7 is bent to a side opposite to a substrate 3 with the beam section 9 not receiving a force. The beam component 8 on the free edge side is not bent to the substrate 3 side nor to the opposite side. The beam component 8 does not have internal stress to bend the beam component 8 to the substrate 3 side nor to the opposite side. COPYRIGHT: (C)2006,JPO&NCIPI |
