| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing synthetic silica glass with high heat resistance capable of manufacturing safely and in a high yield the synthetic silica glass with high heat resistance which has high temperature viscosity characteristics equivalent or superior to those of natural silica glass, and a synthetic silica glass article with high heat resistance which can be easily obtained by the method for manufacturing the synthetic silica glass with high heat resistance. SOLUTION: The method for manufacturing the synthetic silica glass comprises a step of carrying out a coexistence reaction between a silica porous glass material containing a hydroxyl group and an organic silicon compound, and a subsequent step of carrying out a heating substitution treatment and a firing treatment to provide a dense glass article. The heating substitution treatment is carried out in a mixed gas atmosphere from hydrogen and an inert gas, where the volume ratio of the hydrogen contained in the mixed gas is 0.5% or more and 4% or less. COPYRIGHT: (C)2006,JPO&NCIPI
|
