发明名称 Liquid treating apparatus
摘要 A liquid treating apparatus includes an etchant discharging nozzle for discharging a treating solution (E) onto an upper surface of a film carrier tape for mounting an electronic component (T) from above and a treating solution contact prevention chamber disposed on an upstream side of a liquid treating start position (A) in which an etchant (E) discharged onto an upper surface of the film carrier tape (T) through an etchant discharging nozzle starts etching and serving to prevent the discharged solution from coming in contact with the film carrier tape (T) before the liquid treating start position (A). The apparatus also includes a liquid sealing lip member of a first infiltration preventing member and an upper lip component and a lower lip component of a second infiltration preventing member disposed in the treating solution contact prevention chamber.
申请公布号 US2006154490(A1) 申请公布日期 2006.07.13
申请号 US20060330022 申请日期 2006.01.11
申请人 MEC COMPANY LTD. 发明人 NARABAYASHI TETSUYUKI;KUNIMOTO SHINJI;KASAI MAKOTO;TODA KENJI
分类号 H01L21/302 主分类号 H01L21/302
代理机构 代理人
主权项
地址
您可能感兴趣的专利