发明名称 |
Alignment system, vertical tray transporting assembly, and deposition apparatus with the same |
摘要 |
An alignment system, a vertical tray transporting assembly and a deposition apparatus having the same allow alignment of high precision, and perform a stable deposition process in a short period of time, minimize the effect of fine particles during transportation, and secure a sufficient uniformity of a mask by fixing and supporting a vertically disposed substrate using a fixing holder member and an auxiliary attaching member in a tray of a vertical in-line deposition alignment system.
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申请公布号 |
US2006150910(A1) |
申请公布日期 |
2006.07.13 |
申请号 |
US20050302522 |
申请日期 |
2005.12.14 |
申请人 |
HAN SANG-JIN;SONG KWAN-SEOP;JEONG SEOK-HEON;KANG HEE-CHEOL |
发明人 |
HAN SANG-JIN;SONG KWAN-SEOP;JEONG SEOK-HEON;KANG HEE-CHEOL |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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