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发明名称
FARADAY SYSTEM FOR MEASURING THE CURRENT OF ION BEAM
摘要
申请公布号
KR20060081808(A)
申请公布日期
2006.07.13
申请号
KR20050002224
申请日期
2005.01.10
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JEON, YUN KWANG;LEE, YUNG HEE
分类号
G01R19/165
主分类号
G01R19/165
代理机构
代理人
主权项
地址
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