PLASMA GENERATION ELECTRODE AND PLASMA REACTOR

摘要

PROBLEM TO BE SOLVED: To provide a plasma generation electrode composed by accurately and simply positioning a plurality of hierarchically stacked unit electrodes and capable of effectively preventing distortion due to thermal stress.

SOLUTION: This plasma generation electrode 1 is so structured that each of unit electrodes 2 having one-side polarities being the same polarity out of two kinds of unit electrodes 2 and 3 different in polarity has a plate-like conductor 6 having conductivity and a ceramic dielectric material 5 arranged so as to cover the conductor 6; the ceramic dielectric material 5 of the unit electrode 2 of the one-side polarity forms, at one-side end in one direction of at least one-side surface of the ceramic dielectric material 5, at least a part of a space where a discharge space 4 for generating plasma between the unit electrodes 2 and 3 facing to each other and the unit electrode 3 of the other-side polarity facing to the unit electrode 2 of the one-side polarity are arranged; and supporting projections 7 for supporting the unit electrode 2 of the one-side polarity is integrally formed therewith.

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