| 摘要 |
PROBLEM TO BE SOLVED: To block spark at connections of a heater power feed line and the terminal of a semiconductor manufacturing apparatus to prevent the feed line from damage. SOLUTION: The apparatus comprises a substrate process chamber 12, a heater for heating the substrate 13 stored in the process chamber 12, a heater power feed line 48 for feeding the heater with power, and a terminal connected to the heater power feed line and a power feed source. The sharp edge is cut off from at least the corner of the terminal touching the heater power feed line. COPYRIGHT: (C)2006,JPO&NCIPI
|
