| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection system constituted so as to display the inspection result of an inspection target in a form easy to grasp to enhance user's convenience. SOLUTION: The visual inspection system 200 for performing the visual inspection of a substrate 2 is equipped with a surface imaging unit 80a for taking the surface image of the substrate 2, slave PCs 140a and 140b provided so as to correspond to the surface imaging unit 80a to perform inspection on the basis of the image data of the substrate 2, a back imaging unit 80b for taking the image of the back of the substrate 2 and the slave PCs 140c and 140d provided so as to correspond to the back imaging unit 80b to perform inspection from the image data of the back of the substrate 2, a display 170 and a master PC 160 for receiving the respective inspection results from the slave PCs 140a-140d to display the inspection results of the surface and back of the substrate 2 on the display 170 at the same time. COPYRIGHT: (C)2006,JPO&NCIPI
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