发明名称 Field emitter array and method for manufacturing the same
摘要 A field emitter array, and a method for manufacturing the same are provided. The field emitter array comprises a nickel substrate, and a plurality of nano-pillars extending perpendicular to the nickel substrate. Each of the nano-pillars comprises a nickel nano-pillar body integrated to the nickel substrate and extending perpendicular to the nickel substrate, and an upper portion of the nano-pillar comprising a CNT-nickel composite material. At least one CNT is exposed from an upper surface of the upper portion of the nano-pillar. Since the CNTs are provided on the upper surface of the nano-pillars, field emission efficiency can be further enhanced. Additionally, since the substrate, and the nano-pillars extending perpendicular to the substrate are integrated and formed of the same material, contact resistance between the substrate and the nano-pillars is reduced, thereby enhancing the field emission efficiency.
申请公布号 US2006151774(A1) 申请公布日期 2006.07.13
申请号 US20050267285 申请日期 2005.11.07
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 LEE SANG M.;KANG HYOUNG D.;LEE JI W.
分类号 H01L29/06;H01L21/00 主分类号 H01L29/06
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