| 摘要 |
<P>PROBLEM TO BE SOLVED: To devise a process of simplifying the manufacturing process of a color filter for a liquid crystal display device, the filter having a columnar spacer and an overcoat layer, and to devise an exposure mask to be used for the process, and to provide a method for manufacturing the color filter for a liquid crystal display device aimed at cost reduction in manufacturing. <P>SOLUTION: An exposure mask blank is provided for forming together a columnar spacer and an overcoat layer of the color filter for a liquid crystal display device, and the blank has a semi-transparent film having a function of controlling transmittance for UV rays, and a light-shielding film having shielding effect with respect to UV rays, on a glass substrate. The transmittance of the semi-transparent film for UV rays is 5% or lower at 300 nm wavelength and 45% or higher at 380 nm wavelength. The semi-transparent film consists of an ITO film, comprising a compound film of indium oxide and tin oxide containing 10% or lower tin oxide by the ratio of number of atoms. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
