| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope objective lens which corrects various aberration caused by the change of the thickness of a medium existing between the objective lens and a sample, and has the maximized performance. SOLUTION: In the case of replacing a first transparent member interposing between the sample and the microscope objective lens and having a refractive index (n) and thickness d<SB>1</SB>, with a second transparent member intervening between the sample and the microscope objective lens and having the refractive index (n) and thickness d<SB>2</SB>, following conditional expressions (1) and (2) are satisfied. (1)ΔP=Δda-ΔWD+ΔL, (2)ΔL=-(n-1)×Δd×α,α≥0.01, provided thatΔP is focus correction amount (corresponding to a driving ratio for driving a 2nd lens group),Δda is the variation of the thickness of the transparent member (air converted length),ΔWD is the variation of an actuation distance,ΔL is additional correction amount (corresponding to a driving ratio for driving a 1st lens group),Δd is the variation (d<SB>2</SB>-d<SB>1</SB>) of the thickness of the transparent member, (n) is the refractive index of the material of the transparent member, andαis a coefficient. COPYRIGHT: (C)2006,JPO&NCIPI
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