| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared sensor capable of outputting accurately an electromotive force on the basis of a detected infrared quantity by removing the difference of a resistance value caused by a residual stress between an infrared detection element and a dummy pixel. SOLUTION: The dummy pixel 102 has a light receiving part 150 having the same constitution as the infrared detection element and support beams 170a, 170b having a thermopile formed thereon. A cavity 223 is formed under the support beams 170a, 170b. The under part of the light receiving part 150 has no cavity, and is connected to an Si substrate 110 through a polysilicon layer into which boron is injected. The support beams 170a, 170b are provided in midair with the same constitution as the infrared detection element, and are relieved from a stress from the bed to be applied to the beams, and the difference of the resistance value with the infrared detection element can be removed. The light receiving part 150 is connected directly to the Si substrate 110, and heat generated by infrared absorption is escaped efficiently to the Si substrate 110. Hereby, the dummy pixel 102 can output properly a reference level equivalent to a bias voltage. COPYRIGHT: (C)2006,JPO&NCIPI
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