Inductively Coupled Plasma Apparatus of Module Type for Large Area Processing,申请号KR20040033549-传众专利搜索

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发明名称	Inductively Coupled Plasma Apparatus of Module Type for Large Area Processing
摘要
申请公布号	KR100599816(B1)	申请公布日期	2006.07.13
申请号	KR20040033549	申请日期	2004.05.12
申请人		发明人
分类号	H05H1/46	主分类号	H05H1/46
代理机构		代理人
主权项
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