摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a resistor unit with a four terminal structure where a resistance value can appropriately be adjusted even if the resistance value of the resistor unit before trimming is higher than a desired resistance value and length of a trimming groove becomes long at the time of adjusting the resistance value. <P>SOLUTION: At the time of adjusting the resistance value, the trimming groove T1 is formed from a position between top face electrodes 12 at an end part in a resistor 14. Then, a trimming groove T2 is formed. Since effective length of the resistor 14 becomes short by the trimming grooves T1 and T2, the resistance value drops. When length of the trimming groove becomes long, a resistance value change becomes large. Thus, rough adjustment is performed by the first trimming groove T1 and fine adjustment is performed by the second trimming groove T2. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |