摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a multilayer piezoelectric element in which electrical conductivity is ensured sufficiently between an internal electrode layer and conductive adhesive and excellent durability and reliability is exhibited, and also to provide its manufacturing process. <P>SOLUTION: The multilayer piezoelectric element 1 comprises a ceramic laminate 10 formed by laminating a piezoelectric layer 11 of piezoelectric material and conductive internal electrode layers 21 and 22 alternately wherein an external electrode 32 is bonded to the side faces 101 and 102 of the ceramic laminate 10 through conductive adhesive 31. In the side faces 101 and 102 of the ceramic laminate 10, an electrode recess 23 is provided while forming a gap to the piezoelectric layer 11 opposing a part of the internal electrode layers 21 and 22 while being recessed in the laminating direction. The conductive adhesive 31 is arranged to intrude into the electrode recess 23 from the side faces 101 and 102 of the ceramic laminate 10. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |